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Application of the ion mixing method for doping near surfac..:
Volkov, N
;
Kalin, B
;
Voronov, Yu
.
IOP Conference Series: Materials Science and Engineering. 498 (2019) - p. 012025 , 2019
Link:
https://doi.org/10.1088/1757-899x/498/1/012025
RT Journal T1 <Title>Application of the ion mixing method for doping near surface layers of the silicon single crystals</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1757-899x_498_1_012025&Exemplar=1&LAN=DE A1 Volkov, N A1 Kalin, B A1 Voronov, Yu A1 Pershenkov, V PB IOP Publishing YR 2019 SN 1757-899X JF IOP Conference Series: Materials Science and Engineering VO 498 SP 012025 LK http://dx.doi.org/https://doi.org/10.1088/1757-899x/498/1/012025 DO https://doi.org/10.1088/1757-899x/498/1/012025 SF ELIB - SuUB Bremen
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