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Development and researches of vacuum gauges with sensitive ..:
Kuvandykov, R E
;
Teteruk, R A
IOP Conference Series: Materials Science and Engineering. 781 (2020) 1 - p. 012002 , 2020
Link:
https://doi.org/10.1088/1757-899x/781/1/012002
RT Journal T1 <Title>Development and researches of vacuum gauges with sensitive elements created by MEMS technology</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1757-899x_781_1_012002&Exemplar=1&LAN=DE A1 Kuvandykov, R E A1 Teteruk, R A PB IOP Publishing YR 2020 SN 1757-8981 SN 1757-899X JF IOP Conference Series: Materials Science and Engineering VO 781 IS 1 SP 012002 LK http://dx.doi.org/https://doi.org/10.1088/1757-899x/781/1/012002 DO https://doi.org/10.1088/1757-899x/781/1/012002 SF ELIB - SuUB Bremen
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