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DRIE process optimization to fabricate vertical silicon nan..:
Bui, Thanh Tung
;
Tu, Hoan Phuc
;
Dang, Mau Chien
Advances in Natural Sciences: Nanoscience and Nanotechnology. 6 (2015) 4 - p. 045016 , 2015
Link:
https://doi.org/10.1088/2043-6262/6/4/045016
RT Journal T1 <Title>DRIE process optimization to fabricate vertical silicon nanowires using gold nanoparticles as masks</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_2043-6262_6_4_045016&Exemplar=1&LAN=DE A1 Bui, Thanh Tung A1 Tu, Hoan Phuc A1 Dang, Mau Chien PB IOP Publishing YR 2015 SN 2043-6262 JF Advances in Natural Sciences: Nanoscience and Nanotechnology VO 6 IS 4 SP 045016 LK http://dx.doi.org/https://doi.org/10.1088/2043-6262/6/4/045016 DO https://doi.org/10.1088/2043-6262/6/4/045016 SF ELIB - SuUB Bremen
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