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Multi-sensor optical profilometer for measurement of large ..:
Heikkinen, Ville
;
Nysten, Johan
;
Byman, Ville
..
Surface Topography: Metrology and Properties. 8 (2020) 4 - p. 045030 , 2020
Link:
https://doi.org/10.1088/2051-672x/abd293
RT Journal T1 <Title>Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_2051-672x_abd293&Exemplar=1&LAN=DE A1 Heikkinen, Ville A1 Nysten, Johan A1 Byman, Ville A1 Hemming, Björn A1 Lassila, Antti PB IOP Publishing YR 2020 SN 2051-672X JF Surface Topography: Metrology and Properties VO 8 IS 4 SP 045030 LK http://dx.doi.org/https://doi.org/10.1088/2051-672x/abd293 DO https://doi.org/10.1088/2051-672x/abd293 SF ELIB - SuUB Bremen
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