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Deposition processing and surface metrology of MoNx thin fi..:

Chen, Fong-Zhi ; Ting, I-Sheng ; Kang, Wei-Zen..
Surface Topography: Metrology and Properties.  11 (2023)  1 - p. 014011 , 2023
Link: https://doi.org/10.1088/2051-672x/acc088