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1 Ergebnisse
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Precision of diamond turning sinusoidal structures as measu..:
Hüser, Dorothee
;
Meeß, Rudolf
;
Dai, Gaoliang
...
Surface Topography: Metrology and Properties. 12 (2024) 1 - p. 015014 , 2024
Link:
https://doi.org/10.1088/2051-672x/ad2c33
RT Journal T1 <Title>Precision of diamond turning sinusoidal structures as measurement standards used to assess topography fidelity</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_2051-672x_ad2c33&Exemplar=1&LAN=DE A1 Hüser, Dorothee A1 Meeß, Rudolf A1 Dai, Gaoliang A1 Felgner, André A1 Hahm, Kai A1 Verhülsdonk, Stefan A1 Feist, Carsten A1 Gao, Sai PB IOP Publishing YR 2024 SN 2051-672X JF Surface Topography: Metrology and Properties VO 12 IS 1 SP 015014 LK http://dx.doi.org/https://doi.org/10.1088/2051-672x/ad2c33 DO https://doi.org/10.1088/2051-672x/ad2c33 SF ELIB - SuUB Bremen
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