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1 Ergebnisse
1
Abnormal transition of the electron energy distribution wit..:
Yu, Leyi
;
Lu, Wenqi
;
Zhang, Lina
Plasma Science and Technology. , 2024
Link:
https://doi.org/10.1088/2058-6272/ad4596
RT Journal T1
Abnormal transition of the electron energy distribution with excitation of the second harmonic in low-pressure radio-frequency capacitively coupled plasmas
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_2058-6272_ad4596&Exemplar=1&LAN=DE A1 Yu, Leyi A1 Lu, Wenqi A1 Zhang, Lina PB IOP Publishing YR 2024 SN 1009-0630 JF Plasma Science and Technology LK http://dx.doi.org/https://doi.org/10.1088/2058-6272/ad4596 DO https://doi.org/10.1088/2058-6272/ad4596 SF ELIB - SuUB Bremen
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