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1 Ergebnisse
1
Near-zero-adhesion-enabled intact wafer-scale resist-transf..:
Shu, Zhiwen
;
Feng, Bo
;
Liu, Peng
...
International Journal of Extreme Manufacturing. 6 (2023) 1 - p. 015102 , 2023
Link:
https://doi.org/10.1088/2631-7990/ad01fe
RT Journal T1 <Title>Near-zero-adhesion-enabled intact wafer-scale resist-transfer printing for high-fidelity nanofabrication on arbitrary substrates</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_2631-7990_ad01fe&Exemplar=1&LAN=DE A1 Shu, Zhiwen A1 Feng, Bo A1 Liu, Peng A1 Chen, Lei A1 Liang, Huikang A1 Chen, Yiqin A1 Yu, Jianwu A1 Duan, Huigao PB IOP Publishing YR 2023 SN 2631-8644 SN 2631-7990 JF International Journal of Extreme Manufacturing VO 6 IS 1 SP 015102 LK http://dx.doi.org/https://doi.org/10.1088/2631-7990/ad01fe DO https://doi.org/10.1088/2631-7990/ad01fe SF ELIB - SuUB Bremen
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