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1 Ergebnisse
1
Electrostatic chuck having compliant multi-beam structures ..:
Taoka, Yuki
;
Ryo, Tomohiro
;
Xu, Sanchuan
.
Engineering Research Express. 6 (2024) 1 - p. 015046 , 2024
Link:
https://doi.org/10.1088/2631-8695/ad1caf
RT Journal T1
Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_2631-8695_ad1caf&Exemplar=1&LAN=DE A1 Taoka, Yuki A1 Ryo, Tomohiro A1 Xu, Sanchuan A1 Saito, Shigeki PB IOP Publishing YR 2024 SN 2631-8695 JF Engineering Research Express VO 6 IS 1 SP 015046 LK http://dx.doi.org/https://doi.org/10.1088/2631-8695/ad1caf DO https://doi.org/10.1088/2631-8695/ad1caf SF ELIB - SuUB Bremen
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