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1 Ergebnisse
1
Improving Automated TEM Metrology Based on AI Few Shot Lear..:
Oh, Seungwoo
;
Lim, Sung Jin
;
Lee, Soon-Gun
...
Microscopy and Microanalysis. 29 (2023) Supplement_1 - p. 1908-1908 , 2023
Link:
https://doi.org/10.1093/micmic/ozad067.985
RT Journal T1 <Title>Improving Automated TEM Metrology Based on AI Few Shot Learning-DRAM Word Line Patterning Layer and Logic NMOS eSD Seam</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1093_micmic_ozad067.985&Exemplar=1&LAN=DE A1 Oh, Seungwoo A1 Lim, Sung Jin A1 Lee, Soon-Gun A1 Jeong, SeongHoon A1 Song, Changseop A1 Kong, Chanwoong A1 Shon, Su-Bong A1 Park, Hansaem A1 Lee, SungHo A1 Choi, Hyunsu A1 Heo, Yumi PB Oxford University Press (OUP) YR 2023 SN 1431-9276 SN 1435-8115 JF Microscopy and Microanalysis VO 29 IS Supplement_1 SP 1908 OP 1908 LK http://dx.doi.org/https://doi.org/10.1093/micmic/ozad067.985 DO https://doi.org/10.1093/micmic/ozad067.985 SF ELIB - SuUB Bremen
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