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In situ study of noble metal atomic layer deposition proces..:
Dendooven, Jolien
;
Solano, Eduardo
;
Feng, Ji-Yu
...
Acta Crystallographica Section A Foundations and Advances. 77 (2021) a2 - p. C136-C136 , 2021
Link:
https://doi.org/10.1107/s0108767321095453
RT Journal T1 <Title>In situ study of noble metal atomic layer deposition processes using grazing-incidence small-angle X-ray scattering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1107_s0108767321095453&Exemplar=1&LAN=DE A1 Dendooven, Jolien A1 Solano, Eduardo A1 Feng, Ji-Yu A1 Ramachandran, Ranjith K. A1 Minjauw, Matthias M. A1 Van Daele, Michiel A1 Coati, Alessandro A1 Hermida-Merino, Daniel A1 Detavernier, Christophe PB International Union of Crystallography (IUCr) YR 2021 SN 2053-2733 JF Acta Crystallographica Section A Foundations and Advances VO 77 IS a2 SP C136 OP C136 LK http://dx.doi.org/https://doi.org/10.1107/s0108767321095453 DO https://doi.org/10.1107/s0108767321095453 SF ELIB - SuUB Bremen
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