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1 Ergebnisse
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DC Performance Variations by Grain Boundary in Source/Drain..:
Yoon, Jun-Sik
;
Jeong, Jinsu
;
Lee, Seunghwan
...
IEEE Access. 10 (2022) - p. 22032-22037 , 2022
Link:
https://doi.org/10.1109/access.2022.3154049
RT Journal T1
DC Performance Variations by Grain Boundary in Source/Drain Epitaxy of Sub-3-nm Nanosheet Field-Effect Transistors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_access.2022.3154049&Exemplar=1&LAN=DE A1 Yoon, Jun-Sik A1 Jeong, Jinsu A1 Lee, Seunghwan A1 Lee, Junjong A1 Lee, Sanguk A1 Lim, Jaewan A1 Baek, Rock-Hyun PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 2169-3536 JF IEEE Access VO 10 SP 22032 OP 22037 LK http://dx.doi.org/https://doi.org/10.1109/access.2022.3154049 DO https://doi.org/10.1109/access.2022.3154049 SF ELIB - SuUB Bremen
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