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1 Ergebnisse
1
Supervised Multivariate Kernel Density Estimation for Enhan..:
Choi, Jungyu
;
Kim, Bobae
;
Im, Sungbin
.
IEEE Access. 10 (2022) - p. 25580-25590 , 2022
Link:
https://doi.org/10.1109/access.2022.3155513
RT Journal T1
Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_access.2022.3155513&Exemplar=1&LAN=DE A1 Choi, Jungyu A1 Kim, Bobae A1 Im, Sungbin A1 Yoo, Geonwook PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 2169-3536 JF IEEE Access VO 10 SP 25580 OP 25590 LK http://dx.doi.org/https://doi.org/10.1109/access.2022.3155513 DO https://doi.org/10.1109/access.2022.3155513 SF ELIB - SuUB Bremen
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