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Low Ge Content Ultra-Thin Fin Width (5nm) Monocrystalline S..:

Sun, Chong-Jhe ; Tsai, Meng-Ju ; Yan, Siao-Cheng...
IEEE Journal of the Electron Devices Society.  8 (2020)  - p. 1016-1020 , 2020
Link: https://doi.org/10.1109/jeds.2020.3023953