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3D Simulation for Melt Laser Anneal Integration in FinFET's..:

Tabata, Toshiyuki ; Curvers, Benoit ; Huet, Karim...
IEEE Journal of the Electron Devices Society.  8 (2020)  - p. 1323-1327 , 2020
Link: https://doi.org/10.1109/jeds.2020.3030923