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1 Ergebnisse
1
Application of e-Beam Voltage Contrast Technique for Overla..:
Yang, Linrong
;
Li, Runling
;
Hsu, Ikai
...
IEEE Journal of the Electron Devices Society. 10 (2022) - p. 870-875 , 2022
Link:
https://doi.org/10.1109/jeds.2022.3203125
RT Journal T1 <Title>Application of e-Beam Voltage Contrast Technique for Overlay Improvement and Process Window Control in Multi-Patterning Interconnect Scheme</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jeds.2022.3203125&Exemplar=1&LAN=DE A1 Yang, Linrong A1 Li, Runling A1 Hsu, Ikai A1 Zhang, Haiqiong A1 Ren, Jiadong A1 Zhou, Wenzhan A1 Sun, Linlin A1 Xue, Yawen A1 Yang, Wenchao A1 Zhang, Ruilin A1 Zhu, Yefang A1 Zhang, Yan A1 Zhang, Guifeng A1 Fu, Yingying A1 Yin, Shan A1 Jia, Yujie A1 Yu, Bo A1 Brozek, Tomasz PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 2168-6734 JF IEEE Journal of the Electron Devices Society VO 10 SP 870 OP 875 LK http://dx.doi.org/https://doi.org/10.1109/jeds.2022.3203125 DO https://doi.org/10.1109/jeds.2022.3203125 SF ELIB - SuUB Bremen
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