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1 Ergebnisse
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Pelgrom-Based Predictive Model to Estimate Metal Grain Gran..:
Fernandez, Julian G.
;
Seoane, Natalia
;
Comesana, Enrique
.
IEEE Journal of the Electron Devices Society. 10 (2022) - p. 953-959 , 2022
Link:
https://doi.org/10.1109/jeds.2022.3214928
RT Journal T1
Pelgrom-Based Predictive Model to Estimate Metal Grain Granularity and Line Edge Roughness in Advanced Multigate MOSFETs
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jeds.2022.3214928&Exemplar=1&LAN=DE A1 Fernandez, Julian G. A1 Seoane, Natalia A1 Comesana, Enrique A1 Garcia-Loureiro, Antonio PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 2168-6734 JF IEEE Journal of the Electron Devices Society VO 10 SP 953 OP 959 LK http://dx.doi.org/https://doi.org/10.1109/jeds.2022.3214928 DO https://doi.org/10.1109/jeds.2022.3214928 SF ELIB - SuUB Bremen
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