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1 Ergebnisse
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Demonstration of Integrated AlScN Photonic Devices on 8-Inc..:
Li, Zhenyu
;
Bian, Kewei
;
Chen, Xinyi
...
Journal of Lightwave Technology. 42 (2024) 14 - p. 4933-4938 , 2024
Link:
https://doi.org/10.1109/jlt.2024.3382227
RT Journal T1 <Title>Demonstration of Integrated AlScN Photonic Devices on 8-Inch Silicon Substrate</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jlt.2024.3382227&Exemplar=1&LAN=DE A1 Li, Zhenyu A1 Bian, Kewei A1 Chen, Xinyi A1 Zhao, Xingyan A1 Qiu, Yang A1 Dong, Yuan A1 Zhong, Qize A1 Zheng, Shaonan A1 Hu, Ting PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0733-8724 SN 1558-2213 JF Journal of Lightwave Technology VO 42 IS 14 SP 4933 OP 4938 LK http://dx.doi.org/https://doi.org/10.1109/jlt.2024.3382227 DO https://doi.org/10.1109/jlt.2024.3382227 SF ELIB - SuUB Bremen
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