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What is the Young's Modulus of Silicon?:
Hopcroft, Matthew A.
;
Nix, William D.
;
Kenny, Thomas W.
Journal of Microelectromechanical Systems. 19 (2010) 2 - p. 229-238 , 2010
Link:
https://doi.org/10.1109/jmems.2009.2039697
RT Journal T1 <Title>What is the Young's Modulus of Silicon?</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2009.2039697&Exemplar=1&LAN=DE A1 Hopcroft, Matthew A. A1 Nix, William D. A1 Kenny, Thomas W. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2010 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 19 IS 2 SP 229 OP 238 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2009.2039697 DO https://doi.org/10.1109/jmems.2009.2039697 SF ELIB - SuUB Bremen
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