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1 Ergebnisse
1
Assembled Comb-Drive XYZ-Microstage With Large Displacement..:
Xue, Gaopeng
;
Toda, Masaya
;
Li, Xinghui
..
Journal of Microelectromechanical Systems. 31 (2022) 1 - p. 54-62 , 2022
Link:
https://doi.org/10.1109/jmems.2021.3123962
RT Journal T1 <Title>Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2021.3123962&Exemplar=1&LAN=DE A1 Xue, Gaopeng A1 Toda, Masaya A1 Li, Xinghui A1 Wang, Xiaohao A1 Ono, Takahito PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 31 IS 1 SP 54 OP 62 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2021.3123962 DO https://doi.org/10.1109/jmems.2021.3123962 SF ELIB - SuUB Bremen
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