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1 Ergebnisse
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CMOS-Integrated Aluminum Nitride MEMS: A Review:
Pinto, Rui M. R.
;
Gund, Ved
;
Dias, Rosana Alves
..
Journal of Microelectromechanical Systems. 31 (2022) 4 - p. 500-523 , 2022
Link:
https://doi.org/10.1109/jmems.2022.3172766
RT Journal T1 <Title>CMOS-Integrated Aluminum Nitride MEMS: A Review</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2022.3172766&Exemplar=1&LAN=DE A1 Pinto, Rui M. R. A1 Gund, Ved A1 Dias, Rosana Alves A1 Nagaraja, K. K. A1 Vinayakumar, K. B. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 31 IS 4 SP 500 OP 523 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2022.3172766 DO https://doi.org/10.1109/jmems.2022.3172766 SF ELIB - SuUB Bremen
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