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1 Ergebnisse
1
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabl..:
Liu, Chengze
;
Zhang, Menglun
;
Sun, Mingchao
...
Journal of Microelectromechanical Systems. 31 (2022) 4 - p. 664-672 , 2022
Link:
https://doi.org/10.1109/jmems.2022.3181666
RT Journal T1 <Title>Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2022.3181666&Exemplar=1&LAN=DE A1 Liu, Chengze A1 Zhang, Menglun A1 Sun, Mingchao A1 Xu, Linbing A1 Lang, Yiming A1 Gong, Shaobo A1 Pang, Wei PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 31 IS 4 SP 664 OP 672 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2022.3181666 DO https://doi.org/10.1109/jmems.2022.3181666 SF ELIB - SuUB Bremen
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