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Self-Deformable Flexible MEMS Tweezer Composed of Poly(Viny..:
Yamaguchi, Takafumi
;
Usami, Naoto
;
Misumi, Kei
...
Journal of Microelectromechanical Systems. 31 (2022) 5 - p. 802-812 , 2022
Link:
https://doi.org/10.1109/jmems.2022.3187428
RT Journal T1 <Title>Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2022.3187428&Exemplar=1&LAN=DE A1 Yamaguchi, Takafumi A1 Usami, Naoto A1 Misumi, Kei A1 Toyokura, Atsushi A1 Higo, Akio A1 Ono, Shimpei A1 Hwang, Gilgueng A1 Larrieu, Guilhem A1 Ikeuchi, Yoshiho A1 Tixier-Mita, Agnés A1 Saito, Ken A1 Lévi, Timothée A1 Mita, Yoshio PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 31 IS 5 SP 802 OP 812 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2022.3187428 DO https://doi.org/10.1109/jmems.2022.3187428 SF ELIB - SuUB Bremen
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