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1 Ergebnisse
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Remote Actuation of Silicon Nitride Nanomechanical Resonato..:
Mu, Gengyang
;
Snell, Nikaya
;
Zhang, Chang
...
Journal of Microelectromechanical Systems. 32 (2023) 1 - p. 29-36 , 2023
Link:
https://doi.org/10.1109/jmems.2022.3228188
RT Journal T1 <Title>Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2022.3228188&Exemplar=1&LAN=DE A1 Mu, Gengyang A1 Snell, Nikaya A1 Zhang, Chang A1 Xie, Xitong A1 Tahvildari, Radin A1 Weck, Arnaud A1 Godin, Michel A1 St-Gelais, Raphael PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 32 IS 1 SP 29 OP 36 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2022.3228188 DO https://doi.org/10.1109/jmems.2022.3228188 SF ELIB - SuUB Bremen
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