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Analysis and Compensation of Bias Drift of Force-to-Rebalan..:

Ruan, Zhihu ; Ding, Xukai ; Gao, Yang..
Journal of Microelectromechanical Systems.  32 (2023)  1 - p. 16-28 , 2023
Link: https://doi.org/10.1109/jmems.2022.3228268