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1 Ergebnisse
1
Large Displacement Actuators With Multi-Point Stability for..:
Schmitt, Lisa
;
Liu, Xuan
;
Schmitt, Philip
..
Journal of Microelectromechanical Systems. 32 (2023) 2 - p. 195-207 , 2023
Link:
https://doi.org/10.1109/jmems.2023.3236145
RT Journal T1 <Title>Large Displacement Actuators With Multi-Point Stability for a MEMS-Driven THz Beam Steering Concept</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2023.3236145&Exemplar=1&LAN=DE A1 Schmitt, Lisa A1 Liu, Xuan A1 Schmitt, Philip A1 Czylwik, Andreas A1 Hoffmann, Martin PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 32 IS 2 SP 195 OP 207 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2023.3236145 DO https://doi.org/10.1109/jmems.2023.3236145 SF ELIB - SuUB Bremen
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