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Integrated Fabrication Process of Si Microcantilever Using ..:
Aprilia, Lia
;
Meguro, Tatsuya
;
Nuryadi, Ratno
...
Journal of Microelectromechanical Systems. 32 (2023) 3 - p. 290-296 , 2023
Link:
https://doi.org/10.1109/jmems.2023.3263530
RT Journal T1 <Title>Integrated Fabrication Process of Si Microcantilever Using TMAH Solution With Planar Molybdenum Mask</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2023.3263530&Exemplar=1&LAN=DE A1 Aprilia, Lia A1 Meguro, Tatsuya A1 Nuryadi, Ratno A1 Tabei, Tetsuo A1 Mimura, Hidenori A1 Kuroki, Shin-Ichiro PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 32 IS 3 SP 290 OP 296 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2023.3263530 DO https://doi.org/10.1109/jmems.2023.3263530 SF ELIB - SuUB Bremen
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