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1 Ergebnisse
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Platform Development for CMOS-MEMS Multi-Gap Capacitive Tra..:
Chen, Hung-Yu
;
Shih, Po-I
;
Ali, Washim Reza
..
Journal of Microelectromechanical Systems. 32 (2023) 5 - p. 461-473 , 2023
Link:
https://doi.org/10.1109/jmems.2023.3288293
RT Journal T1 <Title>Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2023.3288293&Exemplar=1&LAN=DE A1 Chen, Hung-Yu A1 Shih, Po-I A1 Ali, Washim Reza A1 Li, Ming-Huang A1 Li, Sheng-Shian PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 32 IS 5 SP 461 OP 473 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2023.3288293 DO https://doi.org/10.1109/jmems.2023.3288293 SF ELIB - SuUB Bremen
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