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1 Ergebnisse
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A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Con..:
Hu, Bohao
;
Liu, Wenjuan
;
Yang, Chaoxiang
...
Journal of Microelectromechanical Systems. 32 (2023) 6 - p. 638-644 , 2023
Link:
https://doi.org/10.1109/jmems.2023.3317858
RT Journal T1 <Title>A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2023.3317858&Exemplar=1&LAN=DE A1 Hu, Bohao A1 Liu, Wenjuan A1 Yang, Chaoxiang A1 Lu, Liangyu A1 Wang, Zekai A1 Liu, Yan A1 Cai, Yao A1 Wang, Jian A1 Guo, Shishang A1 Sun, Chengliang PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 32 IS 6 SP 638 OP 644 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2023.3317858 DO https://doi.org/10.1109/jmems.2023.3317858 SF ELIB - SuUB Bremen
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