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1 Ergebnisse
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Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputte..:
Cho, Sinwoo
;
Barrera, Omar
;
Simeoni, Pietro
...
Journal of Microelectromechanical Systems. 32 (2023) 6 - p. 529-532 , 2023
Link:
https://doi.org/10.1109/jmems.2023.3321284
RT Journal T1 <Title>Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2023.3321284&Exemplar=1&LAN=DE A1 Cho, Sinwoo A1 Barrera, Omar A1 Simeoni, Pietro A1 Marshall, Emily N. A1 Kramer, Jack A1 Motoki, Keisuke A1 Hsu, Tzu-Hsuan A1 Chulukhadze, Vakhtang A1 Rinaldi, Matteo A1 Doolittle, W. Alan A1 Lu, Ruochen PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 32 IS 6 SP 529 OP 532 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2023.3321284 DO https://doi.org/10.1109/jmems.2023.3321284 SF ELIB - SuUB Bremen
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