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1 Ergebnisse
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Novel Area-Changed Capacitive Methods for Simultaneous Disp..:
Li, Fangzheng
;
Liu, Dandan
;
Gao, Le
...
Journal of Microelectromechanical Systems. 33 (2024) 1 - p. 12-20 , 2024
Link:
https://doi.org/10.1109/jmems.2023.3334297
RT Journal T1 <Title>Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2023.3334297&Exemplar=1&LAN=DE A1 Li, Fangzheng A1 Liu, Dandan A1 Gao, Le A1 Cai, Bingyang A1 Yang, Lujia A1 Wang, Yuan A1 Zhao, Chun A1 Wu, Wenjie A1 Tu, Liangcheng PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 33 IS 1 SP 12 OP 20 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2023.3334297 DO https://doi.org/10.1109/jmems.2023.3334297 SF ELIB - SuUB Bremen
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