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1 Ergebnisse
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A Q-factor Boost Strategy for High-Order Width-Extensional ..:
Lv, Liangliang
;
Yang, Qingrui
;
Li, Haolin
...
Journal of Microelectromechanical Systems. 33 (2024) 2 - p. 130-132 , 2024
Link:
https://doi.org/10.1109/jmems.2024.3355400
RT Journal T1 <Title>A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2024.3355400&Exemplar=1&LAN=DE A1 Lv, Liangliang A1 Yang, Qingrui A1 Li, Haolin A1 Wang, Zhaoxun A1 Li, Quanning A1 Chen, Xuejiao A1 Zhang, Menglun A1 Pang, Wei PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 33 IS 2 SP 130 OP 132 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2024.3355400 DO https://doi.org/10.1109/jmems.2024.3355400 SF ELIB - SuUB Bremen
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