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1 Ergebnisse
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Dynamic Modeling of a MEMS Electro-Thermal Actuator Conside..:
Zhu, Hengbo
;
Cao, Yun
;
Ma, Wanli
...
Journal of Microelectromechanical Systems. 33 (2024) 2 - p. 217-226 , 2024
Link:
https://doi.org/10.1109/jmems.2024.3363622
RT Journal T1 <Title>Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2024.3363622&Exemplar=1&LAN=DE A1 Zhu, Hengbo A1 Cao, Yun A1 Ma, Wanli A1 Kong, Xiaoyu A1 Lei, Shenghong A1 Lu, Haining A1 Nie, Weirong A1 Xi, Zhanwen PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 33 IS 2 SP 217 OP 226 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2024.3363622 DO https://doi.org/10.1109/jmems.2024.3363622 SF ELIB - SuUB Bremen
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