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A Radiofrequency Threshold Temperature Sensor Using a Hf0.5..:
Kaya, Onurcan
;
Colombo, Luca
;
Simeoni, Pietro
...
Journal of Microelectromechanical Systems. 33 (2024) 2 - p. 151-162 , 2024
Link:
https://doi.org/10.1109/jmems.2024.3364521
RT Journal T1 <Title>A Radiofrequency Threshold Temperature Sensor Using a Hf0.5Zr0.5O2 Device and a Microacoustic Piezoelectric Resonant Sensor</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2024.3364521&Exemplar=1&LAN=DE A1 Kaya, Onurcan A1 Colombo, Luca A1 Simeoni, Pietro A1 Davaji, Benyamin A1 Rinaldi, Matteo A1 Cassella, Cristian PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 33 IS 2 SP 151 OP 162 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2024.3364521 DO https://doi.org/10.1109/jmems.2024.3364521 SF ELIB - SuUB Bremen
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