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1 Ergebnisse
1
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With St..:
Song, Xiangyu
;
Huang, Lifeng
;
Lin, Yuanjing
..
Journal of Microelectromechanical Systems. 33 (2024) 2 - p. 274-281 , 2024
Link:
https://doi.org/10.1109/jmems.2024.3367380
RT Journal T1 <Title>Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2024.3367380&Exemplar=1&LAN=DE A1 Song, Xiangyu A1 Huang, Lifeng A1 Lin, Yuanjing A1 Hong, Linze A1 Xu, Wei PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 33 IS 2 SP 274 OP 281 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2024.3367380 DO https://doi.org/10.1109/jmems.2024.3367380 SF ELIB - SuUB Bremen
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