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1 Ergebnisse
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Characterization of a Temperature-Sensitive Nano Piezoelect..:
Zhang, Jingyi
;
Lyu, Haoqi
;
Yang, Wuhao
...
Journal of Microelectromechanical Systems. 33 (2024) 4 - p. 405-407 , 2024
Link:
https://doi.org/10.1109/jmems.2024.3392402
RT Journal T1 <Title>Characterization of a Temperature-Sensitive Nano Piezoelectric Mechanical Resonator With a 20nm Free-Standing Hf0.5Zr0.5O2 Membrane</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2024.3392402&Exemplar=1&LAN=DE A1 Zhang, Jingyi A1 Lyu, Haoqi A1 Yang, Wuhao A1 Zhong, Hai A1 Liu, Zhuohui A1 Bie, Xiaorui A1 Xiong, Xingyin A1 Wang, Zheng A1 Ge, Chen A1 Zou, Xudong PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 33 IS 4 SP 405 OP 407 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2024.3392402 DO https://doi.org/10.1109/jmems.2024.3392402 SF ELIB - SuUB Bremen
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