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1 Ergebnisse
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Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Usi..:
Du, Xingyu
;
Sharma, Nishant
;
Tang, Zichen
...
Journal of Microelectromechanical Systems. 33 (2024) 5 - p. 577-585 , 2024
Link:
https://doi.org/10.1109/jmems.2024.3430984
RT Journal T1 <Title>Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Using AlScN on SiC</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jmems.2024.3430984&Exemplar=1&LAN=DE A1 Du, Xingyu A1 Sharma, Nishant A1 Tang, Zichen A1 Leblanc, Chloe A1 Jariwala, Deep A1 Olsson, Roy H. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1057-7157 SN 1941-0158 JF Journal of Microelectromechanical Systems VO 33 IS 5 SP 577 OP 585 LK http://dx.doi.org/https://doi.org/10.1109/jmems.2024.3430984 DO https://doi.org/10.1109/jmems.2024.3430984 SF ELIB - SuUB Bremen
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