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1 Ergebnisse
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Q Control of an AFM Microcantilever With Double-Stack AlN S..:
Mahmoodi Nasrabadi, Hazhir
;
Mahdavi, Mohammad
;
Moheimani, S. O. Reza
IEEE Sensors Journal. 22 (2022) 5 - p. 3957-3964 , 2022
Link:
https://doi.org/10.1109/jsen.2022.3141431
RT Journal T1
Q Control of an AFM Microcantilever With Double-Stack AlN Sensors and Actuators
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jsen.2022.3141431&Exemplar=1&LAN=DE A1 Mahmoodi Nasrabadi, Hazhir A1 Mahdavi, Mohammad A1 Moheimani, S. O. Reza PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 1530-437X SN 1558-1748 SN 2379-9153 JF IEEE Sensors Journal VO 22 IS 5 SP 3957 OP 3964 LK http://dx.doi.org/https://doi.org/10.1109/jsen.2022.3141431 DO https://doi.org/10.1109/jsen.2022.3141431 SF ELIB - SuUB Bremen
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