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1 Ergebnisse
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Corrosion and Protection of Silicon Nitride Insulators in M..:
Karttu, Antti
;
Lahtonen, Kimmo
;
Heikkila, Juha
...
IEEE Sensors Journal. 22 (2022) 13 - p. 12504-12514 , 2022
Link:
https://doi.org/10.1109/jsen.2022.3178640
RT Journal T1
Corrosion and Protection of Silicon Nitride Insulators in Microelectrode Array Applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_jsen.2022.3178640&Exemplar=1&LAN=DE A1 Karttu, Antti A1 Lahtonen, Kimmo A1 Heikkila, Juha A1 Valiaho, Jari A1 Narkilahti, Susanna A1 Lekkala, Jukka A1 Kallio, Pasi PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 1530-437X SN 1558-1748 SN 2379-9153 JF IEEE Sensors Journal VO 22 IS 13 SP 12504 OP 12514 LK http://dx.doi.org/https://doi.org/10.1109/jsen.2022.3178640 DO https://doi.org/10.1109/jsen.2022.3178640 SF ELIB - SuUB Bremen
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