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Correction to "high-Q Hf microelectromechanical filters":

Bannon, F.D. ; Clark, J.R. ; Nguyen, C.T.-C.
IEEE Journal of Solid-State Circuits.  35 (2000)  10 - p. 1517-1517 , 2000
Link: https://doi.org/10.1109/jssc.2000.871342