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MEMS for Photonic Integrated Circuits:

Errando-Herranz, Carlos ; Takabayashi, Alain Yuji ; Edinger, Pierre...
IEEE Journal of Selected Topics in Quantum Electronics.  26 (2020)  2 - p. 1-16 , 2020
Link: https://doi.org/10.1109/jstqe.2019.2943384