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1 Ergebnisse
1
Susceptor Coupling for the Uniformity and Dopant Activation..:
Lee, Yao-Jen
;
Hsueh, Fu-Kuo
;
Current, Michael I.
..
IEEE Electron Device Letters. 33 (2012) 2 - p. 248-250 , 2012
Link:
https://doi.org/10.1109/led.2011.2176100
RT Journal T1
Susceptor Coupling for the Uniformity and Dopant Activation Efficiency in Implanted Si Under Fixed-Frequency Microwave Anneal
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_led.2011.2176100&Exemplar=1&LAN=DE A1 Lee, Yao-Jen A1 Hsueh, Fu-Kuo A1 Current, Michael I. A1 Wu, Ching-Yi A1 Chao, Tien-Sheng PB Institute of Electrical and Electronics Engineers (IEEE) YR 2012 SN 0741-3106 SN 1558-0563 JF IEEE Electron Device Letters VO 33 IS 2 SP 248 OP 250 LK http://dx.doi.org/https://doi.org/10.1109/led.2011.2176100 DO https://doi.org/10.1109/led.2011.2176100 SF ELIB - SuUB Bremen
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