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1 Ergebnisse
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Scheduling of Time-Constrained Single-Arm Cluster Tools wit..:
Zou, ChengYu
;
Wang, GengHong
;
Gu, Lei
...
IEEE Robotics and Automation Letters. 9 (2024) 7 - p. 6352-6359 , 2024
Link:
https://doi.org/10.1109/lra.2024.3396112
RT Journal T1 <Title>Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_lra.2024.3396112&Exemplar=1&LAN=DE A1 Zou, ChengYu A1 Wang, GengHong A1 Gu, Lei A1 Li, Jie A1 Wu, NaiQi A1 Qiao, Yan PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 2377-3766 SN 2377-3774 JF IEEE Robotics and Automation Letters VO 9 IS 7 SP 6352 OP 6359 LK http://dx.doi.org/https://doi.org/10.1109/lra.2024.3396112 DO https://doi.org/10.1109/lra.2024.3396112 SF ELIB - SuUB Bremen
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