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Development of an Air-Coupled Piezoelectric Micromachined U..:

Liu, Ya-Han ; Lin, Hsiao-Chi ; Li, Chih-Ying...
IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control.  4 (2024)  - p. 27-36 , 2024
Link: https://doi.org/10.1109/ojuffc.2024.3397630