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IIB-5 Fabrication and operation of small e-beam defined CCD..:

Robinson, D.A. ; Barton, J.B. ; Blocker, T.G...
IEEE Transactions on Electron Devices.  22 (1975)  11 - p. 1058-1059 , 1975
Link: https://doi.org/10.1109/t-ed.1975.18290