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1 Ergebnisse
1
A GPU-Enabled Level-Set Method for Mask Optimization:
Yu, Ziyang
;
Chen, Guojin
;
Ma, Yuzhe
.
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 42 (2023) 2 - p. 594-605 , 2023
Link:
https://doi.org/10.1109/tcad.2022.3175939
RT Journal T1 <Title>A GPU-Enabled Level-Set Method for Mask Optimization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tcad.2022.3175939&Exemplar=1&LAN=DE A1 Yu, Ziyang A1 Chen, Guojin A1 Ma, Yuzhe A1 Yu, Bei PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0278-0070 SN 1937-4151 JF IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems VO 42 IS 2 SP 594 OP 605 LK http://dx.doi.org/https://doi.org/10.1109/tcad.2022.3175939 DO https://doi.org/10.1109/tcad.2022.3175939 SF ELIB - SuUB Bremen
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