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1 Ergebnisse
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Keeping Deep Lithography Simulators Updated: Global–Local S..:
Shao, Hao-Chiang
;
Ping, Hsing-Lei
;
Chen, Kuo-Shiuan
...
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 42 (2023) 3 - p. 1000-1014 , 2023
Link:
https://doi.org/10.1109/tcad.2022.3192175
RT Journal T1 <Title>Keeping Deep Lithography Simulators Updated: Global–Local Shape-Based Novelty Detection and Active Learning</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tcad.2022.3192175&Exemplar=1&LAN=DE A1 Shao, Hao-Chiang A1 Ping, Hsing-Lei A1 Chen, Kuo-Shiuan A1 Su, Weng-Tai A1 Lin, Chia-Wen A1 Fang, Shao-Yun A1 Tsai, Pin-Yian A1 Liu, Yan-Hsiu PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0278-0070 SN 1937-4151 JF IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems VO 42 IS 3 SP 1000 OP 1014 LK http://dx.doi.org/https://doi.org/10.1109/tcad.2022.3192175 DO https://doi.org/10.1109/tcad.2022.3192175 SF ELIB - SuUB Bremen
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