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An ILD Void Detection Method for Monolithic 3-D ICs Based o..:

Xiao, Ziwen ; Yang, Zhiming ; Yu, Yang
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.  42 (2023)  8 - p. 2728-2737 , 2023
Link: https://doi.org/10.1109/tcad.2022.3226318