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1 Ergebnisse
1
CTM-SRAF: Continuous Transmission Mask-Based Constraint-Awa..:
Yu, Ziyang
;
Liao, Peiyu
;
Ma, Yuzhe
..
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 42 (2023) 10 - p. 3402-3411 , 2023
Link:
https://doi.org/10.1109/tcad.2023.3239559
RT Journal T1 <Title>CTM-SRAF: Continuous Transmission Mask-Based Constraint-Aware Subresolution Assist Feature Generation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tcad.2023.3239559&Exemplar=1&LAN=DE A1 Yu, Ziyang A1 Liao, Peiyu A1 Ma, Yuzhe A1 Yu, Bei A1 Wong, Martin D. F. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0278-0070 SN 1937-4151 JF IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems VO 42 IS 10 SP 3402 OP 3411 LK http://dx.doi.org/https://doi.org/10.1109/tcad.2023.3239559 DO https://doi.org/10.1109/tcad.2023.3239559 SF ELIB - SuUB Bremen
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