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Semantic Segmentation-Based Wafer Map Mixed-Type Defect Pat..:

Yan, Jinda ; Sheng, Yi ; Piao, Minghao
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.  42 (2023)  11 - p. 4065-4074 , 2023
Link: https://doi.org/10.1109/tcad.2023.3274958